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Examination of physical and chemical properties of thin layers of arsenic-silicon glasses by means of an X-ray microprobe

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Waczyński K. , Wróbel E. , Pruszowski Z. , Żelechower M.

tom Vol. 31, No. 3/4

468-471

The paper presents results of tests carried out by means of an X-ray of arsenic-silicon glass produced by means of spin-method. The analysis of spectrograms proved the existence of some areas of an increased content of dopants in glass, which can result in the heterogeneity of diffusion layer parameters.

Humidity sensing properties of spin-on phosphorosilica thin films

100%

Waczyński K. , Wróbel E. , Pruszowski Z. , Nowak R.

2000

tom Vol. 33, No. 1/2

217-221

The paper presents results of experiments carried out on the application of the modified phosphoro-silica glasses to the construction of humidity sensors. A new technology for a model sensor production has been worked out. To serve this purpose, tests on the preparation of phosphoro-silica spin-on solutions [1-3] and conditions under which they are placed on a ceramic plate were conducted. Several electrical measurements of the produced structure were taken. A visible influence of humidity on the electrical parameters of a model sensor was observed. It appears that phosphoro--silica glasses (PSG) are a good material for the construction of precise humidity sensors of a repeatable parameters.