This work gives a review of the role of surface and interface potentials in the semiconductor chemical sensor operation. Potentials in other type of gas and ion sensors (lambda sensors, electrochemical cells) are not discussed. The basic principle of solid state chemical sensor operation is the control of the surface and/or interface potential barrier by adsorbed radicals (surface charge or work function change). This potential change can be "read out" by different excitations, such as electrical, thermal. light, mechanical-electrical. Applicable excitations depend on the given sensor realizations and on the setup of the measuring system.
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