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1 Opto-Electronics Review

1 1999

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Laser modification of the electrical properties of vanadium oxide thin films

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Stefanovich G. B. , Pergament A. L. , Chudnovskii F. A. , Kikalov D. O.

Opto-Electronics Review

1999

tom Vol. 7, No. 2

131-134

The effect of laser irradiation on amorphous films of anodic vanadium oxide was studied using a YAG:Nd³⁺ laser at wavelength 1.06 µm. Irradiation was found to lower the electrical conductivity of the oxide films and modify significantly the parameters of electroforming and switching in metal/oxide/metal sandwich structures. The threshold energy for laser modification was measured to be ~ 0.3 mJ/cm². It is shown that the changes of the electrical properties are associated with structural (crystallization) and chemical (in particular, the reduction V₂O₅ → VO₂) transformations and that non-thermal photo-stimulated effects play an important role in the laser modification of the vanadium oxide thin films.