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Sulfide passivation of GaAs surface

Szuber J., Hollinger G., Bergignat E.

Electron Technology

1998

Vol. 31, No. 3/4

328-337

Since the first demonstration by Sandroff et al. in 1987 the treatment og Ga As surface in sulfide solutions has became as one of the most perspective method of the GaAs surface passivation. In this paper we review these research efforts with special emphasis on understanding of the chemical

and electronic changes during passivation.

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Ograniczanie wyników

1 Electron Technology

1 Bergignat E.
1 Hollinger G.
1 Szuber J.

1 1998