Deposition of single or two-layer diamond like carbon (DLC) antireflecting coatind enables the solar cell (SC) efficiency to be improved 1.35 - 1.45 time. It is interesting to note that the SC efficiency improvement after DLC films deposition is connected not only with the antireflecting effect. The DCL films deposition also results in short circuit current (Jsc) increasing but enhancement of open circuit voltage (Voc) and fill factor (FF) as well. The latter is likely caused by passivation of recombination active centers on the SC surface during DLC film deposition and, possibly, by gettering of the defect and impurities from the SC volume. The improvement in SC' efficiency was also observed for SC covered by thin (50-100 nm) antireflecting SiC coatings.
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