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Content available Reliability of large three-dimensional nanosystems
EN
Basic notions and agreements on reliability of three-dimensional nanosystems are introduced. The asymptotic approach to the three-dimensional nanosystem reliability investigation is presented and the nanosystem limit reliability function is defined. Auxiliary theorems on limit reliability functions of three-dimensional nanosystems composed of large number of independent nanocomponents are formulated and the classes of limit reliability functions for a homogeneous series and series-parallel nanosystems are fixed. A model of a three-dimensional series and series-parallel nanosystem with dependent nanocomponents is created and the class of limit reliability functions identical with the class in the previous case is fixed as well. The asymptotic approach to reliability evaluation of exemplary three-dimensonal series and series-parallel nanosystem with dependent nanocomponents is presented and its accuracy is discussed.
EN
The current state of art of electrostatic force microscopy is described in the paper. The principle of electrostatic force operation enabling one to analyse local voltage distribution and capacitance is pre-sented. The design and properties of electrostatic force microscopy microprobes are discussed. The application and manufacturing process of piezoresistive cantilevers with conductive tips and of silicon beams with metallic probe are presented. In order to show the capabilities of electrostatic force micros-copy methods of investigations of local voltage distribution on surfaces of microelectronic integrated circuits (IC) are described. Improvements of electrostatic force microscopy and of other electrical meth-ods based on scanning probe microscopy confirm an increasing interest in electrical probing at the nanometre scale.
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