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This paper presents design, fabrication and testing of three LTCC (Low Temperature Co-fired Ceramics) based microfluidic systems. These microdevices are: enzymatic microreactor for urea determination, potentiometric sensor with ion selective electrodes (ISE) based array sensitive to potassium ions and amperometric glucose sensor. Performance of the presented LTCC-based microfluidic systems has been tested. All ceramic microdevices have revealed high output signal and large detection range. The properties of the presented LTCC-based microfluidic systems are comparable with similar ones made of silicon. Obtained results has shown that presented ceramic microsystems can work as a stand-alone device or can be integrated into a more sophisticated micro analysis system for in vivo or in vitro monitoring of various (bio)chemical compounds.
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Tom
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31--41
Opis fizyczny
Bibliogr. 18 poz., rys., wykr.
Twórcy
autor
autor
autor
autor
- Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland, karol.malecha@pwr.wroc.pl
Bibliografia
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- 8. Gongora-Rubio M. R., Espinoza-Vallejos P., Sola-Laguna L., Santago-Aviles J. J.: Overview of low temperature co-fired tape technology for meso-system technology (MsST). Sensors and Actuators A, Physical 2002, 89, 222-241.
- 9. Muller E., Bartnitzek T., Bechtold F., Pawlowski B., Rohte P., Ehrt R., Heymel A., Weiland E., Schroter T., Schundau S., Kaschlik K.: Development and processing of an anodic bondable LTCC tape. Proc. 1st Int. Conf. and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, Baltimore (USA), 2005, 53-58.
- 10. Bembnowicz P., Golonka L. J.: Integration of transparent glass window with LTCC technology for \miTAS application. J. Europ. Ceram. Soc. 2010, 30, 743-749.
- 11. Malecha K., Gancarz I., Golonka L. J.: A PDMS/LTCC bonding technique for microfluidic applications. J. Micromech. Microeng. 2009, 19, 105016.1-105016.8.
- 12. Ibanez-Garcia N., Machado Goncalves R. D., Mendes da Rocha Z., Gongora-Rubio M. R., Seabra A. C., Alonso Chamarro J.: LTCC meso-analytical system or chloride ion determination in drinking waters. Sensors and Actuators B, Chemical 2006, 118, 67-72.
- 13. Malecha K., Golonka L. J., Bałdyga J., Jasińska M., Sobieszuk P.: Serpentine micromixer made in LTCC. Sensors and Actuators B, Chemical 2009, 143, 400-413.
- 14. Malecha K., Pijanowska D. G., Golonka L. J.: LTCC microreactor for urea determination in biological fluids. Sensors and Actuators B, Chemical 2009, 141, 301-308.
- 15. Sadler D. J., Changrani R., Roberts P., Chou C., Zenhausern F.: Thermal management of BioMEMS: temperature control of ceramic based PCR and DNA detection devices. IEEE Trans. Compon. Pack. Technol. 2003, 26, 309-316.
- 16. Pijanowska D. G., Ramiszewska E., Pederzolli C., Lunelli L., Vendano M., Canteri R., Dudziński K., Kruk J., Torbicz W.: Surface modification for microreactors fabrication. Sensors 2006, 6, 370-379.
- 17. Pijanowska D. G., Sprenkles A. J., Olthuis W., Bergveld P.: A flow-through amperometric sensor for micro-analytical systems, Sensors and Actuators B, Chemical 2003, 91, 98-102.
- 18. Bembnowicz P., Małodobra M., Kubicki W., Szczepańska P., Górecka-Drzazga A., Dziuban J., Jonkisz A., Karpiewska A., Dobosz T., Golonka L. J.: Preliminary studies on LTCC based microreactor. Sensors and Actuators B, Chemical 2010, 150, 715-721.
Typ dokumentu
Bibliografia
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bwmeta1.element.baztech-article-BPZ1-0073-0011