A vacuum device for realizing various processes of positioning thin surface layers with PVD and CVD methods has been constructed in the Institute for Sustainable Technologies - NRI in Radom. It is designed for many various applications, which cannot be achieved by general device. The developed device is of modular structure, in which each functional group can be selected from the suggested series of types and combined as a whole according to the carried out experiment or the created technology. One of the device modules is the system with a load lock for placing, putting in and taking out samples from the vacuum chamber while the process is in progress.