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Content available remote Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source
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Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.
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A laser-plasma extreme ultraviolet source equipped with grazing incidence and Mo/Si collectors was used for surface modification of selected polymers. Surface morphology after irradiation was investigated. Different forms of nanostructures were obtained depending on polymer and irradiation conditions.
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Content available remote Imaging and Patterning on Nanometer Scale Using Coherent EUV Light
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Extreme ultraviolet (EUV) covers wavelength range from about 5 nm to 50 nm. That is why EUV is especially applicable for imaging and patterning on nanometer scale length. In the paper periodic nanopatterning realized by interference lithography and high resolution holographic nanoimaging performed in a Gabor in-line scheme are presented. In the experiments a compact table top EUV laser was used. Preliminary studies on using a laser plasma EUV source for nanoimaging are presented as well.
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Content available remote EUV-Induced Nanostructuring of Solids
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In this work results of investigations concerning nanostructuring of polymers and some other solids using a laser-plasma extreme ultraviolet source are presented. The plasma radiation was produced using a gas puff target and focused with a gold-plated grazing incidence ellipsoidal collector. Decomposition process of polymers was investigated using a quadrupole mass spectrometer. Different kinds of micro- and nanostructures created in near-surface layers of the materials were investigated using scanning electron microscope. Forms of the structures depend on a particular material and the extreme ultraviolet exposure. In case of some polymers even a single shot is sufficient for creation of the visible changes in surface morphology. In case of inorganic solids visible changes require usually the exposure with tens or hundreds of extreme ultraviolet pulses.
EN
The surface modification of polyethylene terephthalate (PET) polymer films has been performed by irradiation of extreme ultraviolet photons to investigate the effect of surface structuring on wettability control. For biomedical engineering applications, surface structuring and wettability control of PET films could enhance the polymer biocompatibility by promoting cell adhesion and consequently proliferation. The PET films are irradiated with laser plasma extreme ultraviolet source based on double stream gas puff target under different environments. The extreme ultraviolet modified PET film surfaces are characterized by atomic force microscopy and WCA goniometer. The extreme ultraviolet surface modification resulted in the formation of nano- and microstructuring on the polymer surfaces. The surface structuring consequently increased WCA making the PET surfaces more hydrophobic. The results demonstrate the direct relationship between surface roughness and hydrophobicity for extreme ultraviolet modified PET samples.
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Laser plasma with temperature of the order of tens eV can be an efficient source of extreme ultraviolet (EUV). The radiation can be focused using different kind of optics, giving sufficient fluence for some applications. In this work we present results of investigations concerning applications of a laser plasma EUV source based on a double stream gas puff target. The source was equipped with two different grazing incidence collectors. One of them was a multifoil collector, the second one was an axisymmetrical ellipsoidal collector. The multifoil mirror was used mainly in experiments concerning micromachining of organic polymers by direct photo-etching. The experiments were performed for different polymers that were irradiated through a fine metal grid as a contact mask. The smallest element of a pattern structure obtained in this way was 5 μm, while the structure height was 50 μm giving an aspect ratio about 10. The laser-plasma EUV source equipped with the axisymmetrical ellipsoidal collector was used for surface modification of organic polymers and inorganic solids. The surface morphology after irradiation was investigated. Different forms of micro- and nanostructures were obtained depending on material and irradiation conditions.
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Content available remote Surface Modification of Solids by Extreme Ultraviolet and Plasma Treatment
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In this paper, results of surface modification, using a laser-produced plasma source of extreme ultraviolet, and the extreme ultraviolet induced low temperature plasmas, are presented. It was shown that irradiation of different materials by intense extreme ultraviolet pulses results in strong changes of the surface morphology. Examples of micro- and nanostructures obtained this way are presented. It was also demonstrated that a dual action of the radiation pulses and low temperature plasmas allows to modify a molecular structure of exposed materials.
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In this work we present recent results on nanoscale imaging in the extreme ultraviolet and soft X-ray spectral ranges, describing three novel imaging systems dedicated for high spatial resolution imaging of nanoscale objects with the extreme ultraviolet and soft X-ray radiations. The extreme ultraviolet and soft X-ray full field microscopes operate at 13.8 nm and 2.88 nm wavelengths and are capable of imaging of nanostructures with a sub-50 nm spatial resolution. A soft X-ray contact microscope operates in the "water-window" spectral range from 2.3 to 4.4 nm wavelength, to obtain images of an internal structure of the investigated object in a thin surface layer of soft X-ray light sensitive photoresist. The development of such compact imaging systems may, in the near future, be important from the point of view of new research related to biological, material science, and nanotechnology applications. Such preliminary applications are also shown in the studies of biological samples, including carcinoma cells, diatoms, and neurons.
EN
During the last two decades, the development of laboratory scale extreme ultraviolet sources has been intensified due to growing interest in use of extreme ultraviolet photons for various applications in science and technology. In this study, we present a potential application of extreme ultraviolet sources for surface modification of polymers to be used as substrates for cancer cell identification. The surface modification of polytetrafluoroethylene (PTFE) polymer samples was performed by a lab scale compact laser-plasma extreme ultraviolet source based on a double-stream gas-puff target. The gas target was irradiated with a 3 ns/0.8 J Nd:YAG laser pulse at 10 Hz. Reference HCV29 non-malignant transitional epithelium and T24 bladder cancer cells adhesion and proliferation studies on pure and extreme ultraviolet sources modified PTFE surfaces were performed. The extreme ultraviolet modified surfaces demonstrated regular increase in cancer cell proliferation comparing to pristine sample. Initial results indicate that extreme ultraviolet treated substrates can facilitate the identification of cancer cells.
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Content available remote Polycarbonate Polymer Surface Modification by Extreme Ultraviolet (EUV) Radiation
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The degree of the biocompatibility of polycarbonate (PC) polymer used as biomaterial can be controlled by surface modification for various biomedical engineering applications. In the past, PC samples were treated by excimer laser for surface reorganization however associated process alteration of bulk properties is reported. Extreme ultraviolet radiation can be employed in order to avoid bulk material alteration due to its limited penetration. In this study, a 10 Hz laser-plasma EUV source based on a double-stream gas-puff target irradiated with a 3 ns and 0.8 J Nd:YAG laser pulse was used to irradiate PC samples. The PC samples were irradiated with different number of EUV shots. Pristine and EUV treated samples were investigated by scanning electron microscopy and atomic force microscopy for detailed morphological characterization of micropatterns introduced by the EUV irradiation. Associated chemical modifications were investigated by X-ray photoelectron spectroscopy. Pronounced wall-type micro- and nanostructures appeared on the EUV modified surface resulting in a change of surface roughness and wettability.
EN
A compact soft X-ray microscope based on a nitrogen double-stream gas puff target soft X-ray source, operating at He-like nitrogen spectral line at the wavelength of λ =2.88 nm is presented. The desk-top size microscope was successfully demonstrated in transmission mode using the Fresnel zone-plate objective and it is suitable for soft X-ray source microscopy in the "water window" spectral range (λ = 2.3÷ 4.4 nm). Details about the soft X-ray source source, the microscope and an example of application in the biomedical field are shown and discussed.
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Content available remote Contact Microscopy using a Compact Laser Produced Plasma Soft X-Ray Source
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Soft X-ray contact microscopy potentially allows imaging of wet living biological specimens at a spatial resolution higher than optical microscopy and without many of the constraints of scanning electron microscopy. In this paper, we present the development of a laboratory scale contact microscope that uses a laser produced plasma soft X-ray source. The source is based on a double-stream gas-puff target approach and it operates in the "water window" spectral range which enables to capture images of biological samples with a natural contrast. In the preliminary experiments the contact microscope system has been used for imaging of fixed and dried non-malignant HCV29 human bladder cell lines cultured on polymethyl methacrylate photoresists. The samples were exposed with 150 pulses of soft X-rays as an initial test to demonstrate the possibility of image formation. The soft X-ray contact images registered in the photoresists exhibit high resolution in the atomic force microscopy topography which indicates the potential application of soft X-ray contact microscopy in life science to examine small features as small as few tens of nm. The technique could also be used for living cell imaging with further optimization of the microscope system and development of a special specimen holder. The details of the soft X-ray contact microscopy technique and the experimental results are presented and discussed.
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Content available remote Biological Action in and out of the Water Window
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This study is dealing with the difference of radiation chemical yields of single and double strand breaks induced in plasmid DNA by photons inside and outside of the soft X-ray water window, i.e., in the wavelength range from 2.28 nm to 4.88 nm. Photons were generated by various plasma sources providing nanosecond and sub-nanosecond pulses of extreme ultraviolet, soft X-ray and X-ray radiation. DNA strand breaks were determined by agarose gel electrophoresis. Higher radiation chemical yields of both single and double strand breaks were found using picosecond and nanosecond sources of extreme ultraviolet and X-ray radiation.
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