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Nanomateriały osadzane laserem impulsowym - technika PLD

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Major B. , Ebner R.

tom R. 2, nr 42

205--215

Application of ablation and deposition of the plume is a method to produce nanomaterials. At present, it is intensivelly studied due to possibility of deposition of various materials. Flexability of the method and transfer of stoichiometry as well as possibility to influence the plume by atmosphere in the reactive chamber makes this method very useful. Limitation is connected with the equipment comprising a laser working in the range of UV wavelenghts in the regime of nano-seconds pulses. Excimer lasers or Nd:Y AG lasers with Q-switch are used in the pulse laser deposition techniques (PLD). Nanostructures produced using Nd:YAG laser of metallic titanium, titanium nitride, titanium oxide were under examination. XRD and electron diffraction were applied to identify the formed phases in the deposited layers. Microstructure on the surface and on the crosss sections was examined by means of SEM and TEM. Residual stresses and texture in the layers were measured using XRD methods.