Constant progress in application of micro-lenses in many modern optical systems caused a continuous increase of the need to investigate methods of their measurement. A new method of measurement of shape deviation of such cylindrical micro-lens has been proposed. The concept is based on measurements of the distance between a reference and the lens surface in various directions. The reference points are established by the rotation axis of a precise rotary table. Detection of the surface of the measured object has been done using a focused laser beam moved by a high-resolution piezotranslator. In the paper we will show the results from our first measurements and we will discuss the advantages and disadvantages of our method as well as the method’s accuracy.
W pracy omówiono konstrukcję i właściwości krzemowych 16-elementowych matryc fotodiodowych, opracowanych w ITE we współpracy z Wydziałem Elektroniki Mikrosystemów i Fotoniki Politechniki Wrocławskiej, do opracowywanego tam systemu optycznego monitorowania parametrów mechanicznych matrycowych czujników mikrodźwigniowych.
EN
In this paper, we present the construction and properties of the 16-element silicon photodiode arrays developed at the ITE in collaboration with the Faculty of Microsystem Electronics and Photonics at the Wrocław University of Technology. The photodiode arrays will be applied in the system, being developed at the Wrocław University of Technology, monitoring optically the mechanical parameters of multiple microcantilever based sensors.
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