The present study reports results of the synthesis of randomly oriented Bi4Ti3O12 (BTO) thin films by a modified hybrid sol-gel process. Bismuth nitrate and titanium(IV) butoxide were used as the starting materials. Crystalline films were deposited on silicon and stainless steel substrates by spin coating and subsequently annealed at 650 0C. The structure of the films was investigated by X-ray diffraction. The formation of a layered perovskite-like structure with orthorhombic symmetry was confirmed. Scanning electron microscopy showed that the surfaces of the films were smooth, dense, and crack free. Conservation of the chemical composition was confirmed by energy dispersive spectroscopy.
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