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1 Materials Science Poland

1 2005

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Quantitative mapping of elastic properties of electron-beam damaged silica-based low-k films

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Jiang L. , Geisler H. , Zschech E.

tom Vol. 23, No. 3

643--651

A quantitative technique for mapping of elastic modulus performed on organosilicate glass (OSG) thin films with different surface conditions is described. This modulus mapping technique provides highly valuable information about the elastic properties at the very near-surface region of the films. The results show that low-k films can be modified by electron beams, leading to a near-surface region with increased stiffness. Compared with quasi-static nanoindentation, the modulus mapping technique is more surface sensitive, and therefore, it has a better capability to detect slight differences of elastic properties between ultra-thin films of different thickness on top of OSG films.