A method to develop the structure of the internal pore surface is proposed. The surface of porous silicate glasses is modified by impregnating carbon into the pores and subsequent annealing. The procedure is repeated several times. A technique to control the properties of the pore surface is proposed as well. Analysing the change in the features of the photoluminescence spectrum as a result of such treatment in comparison with the pore-size distribution spectra allows us to assume formation of silicon nanoclusters in porous glass and to estimate their sizes. The nonmonotonic change of the surface development with simultaneous stationary increase of photoluminescence intensity is explained by the composite pattern of the silicon clusters change during multiple carbon treatments.
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