Anisotropy inhomogeneity of rf sputtered permalloy thin films was measured using the TBP method. Angular distribution function showed the Lorentz distribution because of a long taol to high Hk. With increasing film thicknees, both the angular and magnitude anisotropy dispersion increased. This could be attributed to the increase of grain size and local anisotropy, as suggested by the Hoffmann ripple theory. However, the complex permeability calculated with both anisotropy inhomogeneity and eddy current effects taken into account did not match well the measured permebility.
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