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2 Open Physics

2 2012

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Multiaxis interferometric displacement measurement for local probe microscopy

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Lazar J. , Hrabina J. , Šerý M. , Klapetek P. , Číp O.

Open Physics

2012

tom 10

nr 1

225-231

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Study of the thermal stability of Zerodur glass ceramics suitable for a scanning probe microscope frame

100%

Číp O. , Šmíd R. , Čížek M. , Buchta Z. , Lazar J.

Open Physics

2012

tom 10

nr 2

447-453

The work presents measurements of the length stability of Zerodur glass ceramic with temperature change. Measurement of this thermal characteristic is necessary for determination of the optimal temperature at which the Zerodur glass ceramic has a coefficient of thermal expansion close to zero. The principle of the measurement is to monitor the length changes using an optical resonator with a cavity mirror spacer made from the Zerodur material to be studied. The resonator is placed inside a vacuum chamber with a temperature control. A tunable laser diode is locked to a certain optical mode of the resonator to monitor the optical frequency of this mode. A beat-note signal from optical mixing between the laser and a stabilized femtosecond frequency comb is detected and processed. The temperature dependence of the glass ceramics was determined and analyzed. The resolution of the length measurement of the experimental set-up is on the order of 0.1 nm.