Influence of the Ostwald ripening on character of the size distribution in semiconductor heterosystems with quantum dots as island films consisting of cylindrical, disclike islands of constant height is studied. Size distribution function and formulae for temporal changes of average island size are derived. Calculations are carried out within the LSW theory, in assumption of joint action of two (diffusion and Wagner) growing mechanisms. Comparison of the calculating results with experimental data proves validity of the accepted model approximations. Expectancy of correlation of the distribution function, growing mechanisms and properties of heterosystems is discussed.
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