In this study, the combined effect of Zr and Si on isothermal oxidation of Ti for 25 and 50h at 820°C, which is the temperature related to exhaust valves operation, was investigated. Si addition into Ti-5mass%Zr alloy led to a distribution of silicide Ti5Si3 phase formed by a eutectic reaction. The Ti sample containing only Zr showed more retarded oxidation rate than Ti-6Al-4V, the most prevalent Ti alloy, at the same condition. However, while a simultaneous addition of Zr and Si resulted in greater increase of oxidation resistance. The oxide layer formed after the addition of Zr and Si comprised TiO2, ZrO2, and SiO2.