In order to the long-term stability of DSE for electroplating process, the lifetime equations were calculated from the results of the accelerated life testing, and the lifetime of DSE was predicted. The nano-embossing pre-treatment led to 2.65 times in the lifetime of DSE. The degradation mechanism of DSE with a thick metal oxide layer for applied highly current density process condition was identified. The improvement of durability of DSE seems to be closely related to adhesion between titanium plate and mixed metal oxide layer.
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