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1 Optica Applicata

1 2002

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Determination of stress in Au/Ni multilayers by symmetric and asymmetric X-ray diffraction

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Chocyk D. , Prószyński A. , Gładyszewski G. , Labat S. , Gergaud P. , Thomas O.

tom Vol. 32, nr 3

333-337

A stress analysis was done for Au/Ni multilayers prepared by molecular beam epitaxy and by thermal evaporation. The lattice parameters in the growth and in-plane directions of multilayer constituents were directly determined by the analysis of the symmetric and asymmetric X-ray diffraction (XRD) profiles. The q–2q XRD profiles were interpreted using the 1D model of non-ideal superlattice structure, whereas the asymmetric XRD profiles using the 3D model. Both models were based on the Monte Carlo simulation and on the kinematical theory of scattering. It was shown that considerable stress was encountered in multilayers with in-plane structural cohere.