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Capacitive MEMS accelerometer with apen-loop switched-capacitor readout circuit

100%

Szermer M. , Amrozik P. , Zając P. , Maj C. , Napieralski A.

International Journal of Microelectronics and Computer Science

2018

tom Vol. 9, nr 4

142--148

MEMS are one of the fastest developing branch in microelectronics. Many integrated sensors are widely used in smart devices i.e. smartphones, and specialized systems like medical equipment. In the paper we present the main parts of a system for measuring human movement which can be used in human balance disorder diagnosis. We describe our design of capacitive accelerometers and dedicated switched capacitor readout circuit. Both will be manufactured as separate chips in different technological processes. The principle of operation, schematics and layouts of all parts of the system are presented. Preliminary simulations show that the proposed designs are applicable for the considered medical device.

Self-noise reduction in a FOG-based rotational seismometer confirmed by Allan variance analysis

58%

Zając P. , Amrozik P. , Kiełbik R. , Maj C. , Szermer M. , Starzak Ł. , Pękosławski B. , Jabłoński G. , Tylman W. , Kurzych A. , Jaroszewicz L. R.

Opto-Electronics Review

2024

tom Vol. 32, No. 4

art. no. e152766

Reducing noise in fibre-optic gyroscope (FOG)-based rotational seismometers is crucial in guaranteeing their applicability as future high-precision sensors. This paper presents a practical approach to noise analysis of a designed and manufactured FOG-based three-axis rotational seismometer. The performed measurements show that proper identification of noise sources and subsequent changes to the device’s configuration which addressed these noise issues, visibly improved the Allan deviation plot of the device. In particular, angle random walk was reduced from 100–200 to around 35 nrad/s/√Hz and bias instability – from several dozens down to single nrad/s. These improvements were achieved only by elimination or mitigation of the impact of all noise sources, without changing any optoelectronic components of the constructed device and without applying any additional post-processing methods.