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2003 | Vol. 11, No. 2 | 161-167
Tytuł artykułu

Spectral detectivity and NETD of doping-spike PtSi/p-Si and GeSi/Si HIP detectors

Wybrane pełne teksty z tego czasopisma
Warianty tytułu
Konferencja
Third International Conference on Solid State Crystals. Materials Science and Applications. ICSSC '2002 ; (14.10-18.10.2002 ; Zakopane, Poland)
Języki publikacji
EN
Abstrakty
EN
Platinum silicide Schottky barrier detectors (SBD) and GeSi/Si - based heterojunction internal photoemission (HIP) detectors are widely used for application in the infrared spectral range. The increase in cutoff wavelength and responsivity of PtSi/Si photodevices is possible by formation of heavily-doped thin layer near to the semiconductor surface. The cutoff wavelength of GexSi1-x /Si - based HIP detectors depends on x and concentration of boron in GeSi. In this report, the threshold properties of these detectors are considered. The dependencies of spectral detectivities and NETD on cutoff wavelength are calculated for various parameters of SBD and HIP detectors. It is shown that optimal NETD of a SBD and HIP detectors is possible for certain cutoff wavelength and temperature of detectors and depends on storage capacity. Also opportunity of formation of heavily-doped nanolayer in SBD detectors used by short-pulse recoil implantation of boron was studied
Wydawca

Rocznik
Strony
161-167
Opis fizyczny
Bibliogr. 14 poz.
Twórcy
  • Siberian Physico-Technical Institute, 1 Novosobornaya Ave., 634050 Tomsk, Russia, vav@elefot.tsu.ru
  • Siberian Physico-Technical Institute, 1 Novosobornaya Ave., 634050 Tomsk, Russia
  • Siberian Physico-Technical Institute, 1 Novosobornaya Ave., 634050 Tomsk, Russia
Bibliografia
  • 1. A. Rogalski, lnfrared Detectors, Chapter 10, Gordon Press, London, 2000.
  • 2. R. Breaiter, W. Cabanski, and R. Koch, "Focal plane arrays: MCT, quantum wells, PtSi", Proc. SPIE 3436, 359-374 (1998).
  • 3. V.G. lvanov, V.I. Panasenkov, and G.V. Ivanov, "Photocarriers generation processes in Schottky barriers and possibilities to control the value and spectral dependence of quantum efficiency in an IR SB CCD", Proc. SPIE 3819, 143-148 (1999).
  • 4. P.J. Sauer, F. V. Shallcross, and F.L. Hsueh, "640x480 MOS PtSi IR sensor", Proc. SPIE 1540, 285-296 (1991).
  • 5. L.R. Hudson, H.F. Tseng, and W.L. Wang, "PtSi infrared area array utilising MOS/CTD readout", Proc. SPIE 819, 262-267 (1987).
  • 6. J.M. Shannon, "Increasing he effective height of a Schottky barrier using low energy ion implantation", Appl. Phys. Lett. 25, 75-77 (1974).
  • 7. J.M. Shannon, "Reducting the effective height of a Schottky barrier using low-energy ion implantation", Appl. Phys. Lett. 24, 369-371 (1974).
  • 8. T.L. Lin, J.S. Park, and T. George, "Doping-spike PtSi Schottky infrared detectors with extended cutoff wavelength", Appl. Phys. Lett. 62, 3318-3320 (1993).
  • 9. T.L. Lin, J.S. Park, and S.D. Gunapala, "Tailorable doping-spike PtSi infrared detectors fabricated by Si molecular beam epitaxy", Jpn. J. Appl. Phys. 33, 2435-2438 (1994).
  • 10. T.L. Lin, A. Ksendzov, S.M. Dejewski, E.W. Jones, R.W. Fathauer, T.N. Krabach, and J. Maserjian, "SiGe /Si heterojunction interna! photoemission long-wavelength infrared detectors fabricated by molecular beam epitaxy", IEEE Trans. Electron Dev. 38, 1141-1144 (1991).
  • 11. H. Wada, M. Nagahima, and K. Hayashi, "512x512 element GeSi/Si heterojunction infrared FPA", Proc. SPIE 3698, 584-595 (1999).
  • 12. A.V. Voitsekhovskii, A.P. Kokhanenko, A.G. Korotaev, and S.N. Nesmelov, "The photoelectric characteristics of a PtSi/Si barrier with boron heavily-doped nanolayer", Proc. SPIE 4413, 387-391 (2001).
  • 13. A.V. Voitsekhovskii, A.P. Kokhanenko, A.G. Korotaev, and N.S. Nesmelov "Modification of parameters of silicon Shottky barriers using powerful ion irradiation", Proc. 1st Int. Congress on Radiation Physics, High-Current Electronics, and Modification of Materials 3, Tomsk, 362-365 (2000).
  • 14. A.V. Voitsekhovskii, A.P. Kokhanenko, and A.D. Korotaev "Recoil implantation of boron in silicon for modification of parameters of silicon Schottky detectors", Proc. SPIE 3881, 274-279 (1999).
Typ dokumentu
Bibliografia
Identyfikatory
Identyfikator YADDA
bwmeta1.element.baztech-article-BWA2-0007-0013
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