3-D silicon micromachining for AFM/LFM microprobe development

• Autorzy: Grabiec, P. , Domański, K. , Dumania, P. , Studzińska, K. , Gotszalk, T. , Rangelow, I. W. , Sunyk, R.
• Języki publikacji: EN

Abstrakty

EN

Results of work on the development of microprobes for the simultaneous Atomic/Lateral Force Measurements (AFM/LFM) are presented. AFM/LFM microprobes for surface characterization were modelled using FEM, designed and fabricated using 3-D silicon processing sequence. Finally microprobes were evaluated by using them for characterization of the test surfaces.

• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 4
• Strony: 577-591
• Opis fizyczny: Bibliogr. 7 poz

Twórcy

autor

Grabiec, P.

autor

Domański, K.

autor

Dumania, P.

autor

Studzińska, K.

autor

Gotszalk, T.

autor

Rangelow, I. W.

autor

Sunyk, R.

• Institute of Electron Technology al. Lotników 32/46, 02-668 Warszawa, Poland