Simple, low cost quartz crystal monitor system for metal phthalocyanine thin film growth control

• Autorzy: Matkowski, P. , Grządziel, L. , Szuber, J.
• Konferencja: International Seminar on Semiconductor Gas Sensors : SGS' 98 (1 ; 22-25.09.1998 ; Ustroń, Poland)
• Języki publikacji: EN

Abstrakty

EN

In this paper we describe the low cost monitor system, using the quartz crystal microbalance (QCM), for the groeth control of the metal phthalocyanines during deposition under UHV conitions. After short analysis of the theoretical basic of QCM, the detailed description of the elaborated systen is presented, together with its performance in the control of the deposition of the copper phthalocyanine (CuPc) thin films.

• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 1/2
• Strony: 297-301
• Opis fizyczny: Bibliogr. 16 poz.

Twórcy

autor

Matkowski, P.

autor

Grządziel, L.

autor

Szuber, J.

• Departament of Semiconducor Surfaces Physics, Institute of Physics, Silesian Technical University, ul. Krzywoustego 2, 44-100 Gliwice , Poland,