Humidity sensing properties of spin-on phosphorosilica thin films

• Autorzy: Waczyński, K. , Wróbel, E. , Pruszowski, Z. , Nowak, R.
• Konferencja: International Seminar on Semiconductor Gas Sensors : SGS' 98 (1 ; 22-25.09.1998 ; Ustroń, Poland)
• Języki publikacji: EN

Abstrakty

EN

The paper presents results of experiments carried out on the application of the modified phosphoro-silica glasses to the construction of humidity sensors. A new technology for a model sensor production has been worked out. To serve this purpose, tests on the preparation of phosphoro-silica spin-on solutions [1-3] and conditions under which they are placed on a ceramic plate were conducted. Several electrical measurements of the produced structure were taken. A visible influence of humidity on the electrical parameters of a model sensor was observed. It appears that phosphoro--silica glasses (PSG) are a good material for the construction of precise humidity sensors of a repeatable parameters.

• Czasopismo: Electron Technology
• Rocznik: 2000
• Tom: Vol. 33, No. 1/2
• Strony: 217-221
• Opis fizyczny: Bibliogr. 18 poz.

Twórcy

autor

Waczyński, K.

autor

Wróbel, E.

autor

Pruszowski, Z.

autor

Nowak, R.

• Departament of Electron Technology, Institute of Electronics, Silesian Technical University ul. Akademicka 16, 44-100 Gliwice Poland