Determination of surface waviness using radius of curvature measurement with laser scanning technique

• Autorzy: Pieńkos, T. , Gładyszewski, L. , Prószyński, A. , Chocyk, D. , Gładyszewski, G.
• Konferencja: Surface Physics and Thin-Films Structure Seminar ; 17-21.05.2005 ; Szklarska Poręba, Poland
• Języki publikacji: EN

Abstrakty

EN

A method for obtaining the shape of a surface investigated with a laser scanning curvature measurement is presented. Additional simple analysis of raw experimental data allows one to determine waviness of the sample. The accuracy of the method and comparison of the results obtained with the method and commercial profilometer are also described.

Słowa kluczowe

EN

waviness; curvature; profilometer

• Czasopismo: Optica Applicata
• Rocznik: 2005
• Tom: Vol. 35, nr 3
• Strony: 503-507
• Opis fizyczny: Billiogr. 1 poz., wykr.

Twórcy

autor

Pieńkos, T.

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskej 1, 20-031 Lublin, Poland

autor

Gładyszewski, L.

• Institute of Physics, Maria Curie-Skłodowska University, pl. M. Curie-Skłodowskej 1, 20-031 Lublin, Poland

autor

Prószyński, A.

• Institute of Physics, Lublin University of Technology, ul. Nadbystrzycka 38, 20-618 Lublin, Poland

autor

Chocyk, D.

• Institute of Physics, Lublin University of Technology, ul. Nadbystrzycka 38, 20-618 Lublin, Poland

autor

Gładyszewski, G.

• Institute of Physics, Lublin University of Technology, ul. Nadbystrzycka 38, 20-618 Lublin, Poland

Bibliografia

• [1] Flinn P.A., Gardner D.S., Nix W.D., Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history, IEEE Transactions on Electron Devices 34(3), 1987, pp. 689-99.