Thin films of ZnO and ZnMnO by atomic layer epitaxy

• Autorzy: Wójcik, A. , Kopalko, K. , Godlewski, M. , Łusakowska, E. , Guziewicz, E. , Minikayev, R. , Paszkowicz, W. , Świderski, J. , Klepka, M. , Jakieła, R. , Kiecana, M. , Sawicki, M. , Dybko, K. , Phillips, M. R.
• Konferencja: Surface Physics and Thin-Films Structure Seminar ; 17-21.05.2005 ; Szklarska Poręba, Poland
• Języki publikacji: EN

Abstrakty

EN

We discuss properties of thin films of ZnO and ZnMnO grown with atomic layer epitaxy using new, organic zinc and manganese precursors. Several characterization techniques, including X-ray diffraction, atomic force microscopy, scanning electron microscopy, cathodoluminescence, superconducting quantum interfernece device (SQUID) and electron spin resonance, show good topography of the films and their advantageous optical and magnetic properties.

Słowa kluczowe

EN

ZnO; magnetism; low temperature growth; organic precursors

• Czasopismo: Optica Applicata
• Rocznik: 2005
• Tom: Vol. 35, nr 3
• Strony: 413-4217
• Opis fizyczny: Bibliogr. 7 poz., wykr.

Twórcy

autor

Wójcik, A.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Kopalko, K.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Godlewski, M.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland
• Department of Mathematics and Natural Sciences College of Science, Cardinal Stefan Wyszyński University, ul. Dewajtis 5, 01-815 Warszawa, Poland

autor

Łusakowska, E.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Guziewicz, E.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Minikayev, R.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Paszkowicz, W.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Świderski, J.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Klepka, M.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Jakieła, R.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Kiecana, M.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Sawicki, M.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Dybko, K.

• Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, Warszawa, Poland

autor

Phillips, M. R.

• Microstructural Analysis Unit, UTS, Sydney, Australia

Bibliografia

• [1] Suntola T., Handbook of crystal growth, [Ed.] Hurle D.T.J., Thin films and epitaxy, vol. 3B, North Holland, Amsterdam 1994, ch. 14, p. 601.
• [2] Ritala M., Leskela M., Handbook of Thin Film Materials, [Ed.] H. Nalwa, Academic Press 2002, Vol. 1, Deposition and Processing of Thin Films, Ch. 2, Atomic Layer Deposition, pp. 103-159.
• [3] Godlewski M., Szczerbakow A., Godlewski M.M., Thin films of wide bandgap II-VIcompounds grown by atomic layer epitaxy properties and application, Journal of Wide Bandgap Materials 9(1-2), 2001, pp. 75-82.
• [4] Kopalko K., Godlewski M., Guziewicz E., Łusakowska E., Paszkowicz W., Domagała J., Dynowska E., Szczerbakow A., Wójcik A., Phillips M.R., Monocrystalline thin films of ZnSe and ZnO grown by atomic lay^r epitaxy, Vacuum 74(2), 2004, pp. 269-72.
• [5] Guziewicz E., Godlewski M., Kopalko K., Łusakowska E., Dynowska E., Guziewicz M., Godlewski M.M., Phillips M.R., Atomic layer deposition of thin films of ZnSe-structural and optical characterization, Thin Film Solids 446(2), 2004, pp. 172-7.
• [6] Kopalko K., Godlewski M., Domagala J.Z., Lusakowska E., Minikayev R., Paszkowicz W., Szczerbakow A., Monocrystalline ZnO films on GaN/Al2O3 by atomic layer epitaxy in gas flow, Chemistry of Materials 16(8), 2004, pp. 1447-50.
• [7] Dietl T., Ohno H., Matsukura F., Cibert J., Ferrand D., Zener model description offerromagnetism in zinc-blende magnetic semiconductors, Science 287(5455), 2000, pp. 1019-22