Fabrication of micro- and nanostructures by scanning probe microscopy. Local anodic oxidation

• Autorzy: Kolanek, K. , Gotszalk, T. , Zielony, M. , Grabiec, P.
• Języki publikacji: EN

Abstrakty

EN

Atomic force microscopy (AFM) is a high resolution imaging technique in which a cantilever with a very sharp tip is scanned over a sample surface. AFM technique can also be used to fabricate micro- and nanostructures on metallic or semiconductor surfaces. Nanolithography by local anodic oxidation or by noncontact atomic force microscopy (NC-AFM) has strong potential to pattern the surface with a well defined feature size at the nanometer regime. In the paper, the growth rate of nanostructures produced by local anodic oxidation process has been investigated. Mechanisms of nanooxidation have been studied and dependences of its rate and resolution on the voltage applied between the tip and a sample surface, tip speed, and ambient humidity.

Słowa kluczowe

EN

local anodic oxidation; nanolithography; scanning probe microscopy; atomic force microscope

• Czasopismo: Materials Science Poland
• Rocznik: 2008
• Tom: Vol. 26, No. 2
• Strony: 271--278
• Opis fizyczny: Bibliogr. 9 poz.

Twórcy

autor

Kolanek, K.

autor

Gotszalk, T.

autor

Zielony, M.

autor

Grabiec, P.

• Wrocław University of Technology, Faculty of Microsystem Electronics and Photonics, ul. Janiszewskiego 11/17, 50-372 Wrocłlaw, Poland

Bibliografia

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