Combined SNOM/AFM microscopy with micromachined nanoapertures

• Autorzy: Radojewski, J. , Grabiec, P.
• Języki publikacji: EN

Abstrakty

EN

We describe a new combined SNOM/AFM cantilever probe with the aperture FIB micromachined in a hollow metal pyramid fabricated on its end. The cantilever can be used in a microscopy set-up with the optical or piezoresitive AFM detection system. A processing sequence proposed in the article offers a high reproducibility in batch processing typical of semiconductor technology. Morover, the angle of the apex cone is closed to 50° which renders it possible to obtain a high-aperture optical throughoutput. The probe construction, manufacturing and its basic optical parameters are described.

Słowa kluczowe

EN

AF; SNOM microscopy; cantilever technology; nanoaperture

• Czasopismo: Materials Science
• Rocznik: 2003
• Tom: Vol. 21, No. 3
• Strony: 319-332
• Opis fizyczny: Bibliogr. 17 poz.

Twórcy

autor

Radojewski, J.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Poland,

autor

Grabiec, P.

• Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland

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