Application of the sol-gel metod to deposition of thin films

• Autorzy: Zarycka, A. , Ilczuk, J. , Czekaj, D.
• Języki publikacji: EN

Abstrakty

EN

A method for synthesizing ferroelectric thin films of lead zirconate-titanate (PZT) and lead-lanthanum zirconate-titanate (PLZT) by a modified sol-gel technique is reported. The following chemical compositions with the Zr/Ti ratio were obtained: PZT 65/35 and PLZT 6.5/65/35. Thin films, prepared from acetate and alkoxide precursors of La, Pb, Zr and Ti, were deposited on stainless steel and MgO substrates by spin coating. Crystallization of PZT-based electroceramic thin films was performed by thermal annealing at the temperature range of 550-700 st.C. The structure of the thin films was investigated by X-ray diffraction. The formation of the perovskite-type structure was confirmed. Microstructure was investigated by the optical microscopy. Technological conditions of the preparation of thin films were optimized.

Słowa kluczowe

EN

sol-gel method; ferroelectric ceramics; PLZT; PZT

• Czasopismo: Materials Science
• Rocznik: 2003
• Tom: Vol. 21, No. 4
• Strony: 439-443
• Opis fizyczny: Bibliogr. 7 poz.

Twórcy

autor

Zarycka, A.

• University of Silesia, Faculty of Engineering, Department of Materials Science, ul. Żeromskiego 3, 41-200 Sosnowiec, Poland,

autor

Ilczuk, J.

• University of Silesia, Faculty of Engineering, Department of Materials Science, ul. Żeromskiego 3, 41-200 Sosnowiec, Poland

autor

Czekaj, D.

• University of Silesia, Faculty of Engineering, Department of Materials Science, ul. Żeromskiego 3, 41-200 Sosnowiec, Poland

Bibliografia

• [1] Surowiak, Z., Mol. Quant. Acoust., 21 (2000), 267.
• [2] Surowiak Z., Dudkevich V. P., Cienkie warstwy ferroelektryczne (Thin Ferroelectric Films, in Polish), Wyd. Uniw. Ś1., Katowice, 1996.
• [3] Czekai D., Technology, Properties and Applications of PZT Thin Films, Wyd. Uniw. SI., Katowice, 2002.
• [4] Matthes B., Tomandl G., Werner G., J. Ceram. Soc., 19 (1999), 1387.
• [5] Pak D.S., Komarneni S., Mat. Res. Bull., 32, 8 (1997), 1091.
• [6] Caruso R., de Sanctis O., Frattini A., Steren C., Gil R., Surface and Coatings Techn., 122 (1999), 44.
• [7] Meng X. J., Cheng J.G., Li B., Guo S.L., Ye H.J., Chu J.H., J. Ciyst. Growth, 208 (2000), 541.