New trends in coating: Room temperature deposition of titanium-based films

• Autorzy: Lackner, J.M. , Waldhauser, W. , Berghauser, R. , Ebner, R. , Major, B. , Fian, A. , Jakopic, G.
• Konferencja: Advanced Materials and Technologies, AMT'2004 : XVII Physical Metallurgy and Materials Science Conference (XVII; 20-24.06.2004; Łódź, Polska)
• Języki publikacji: EN

Abstrakty

EN

Titanium-based compounds are widely spread coating materials for mechanical, tribological, electrical, optical, catalytic, sensoric, micro-electronical applications due to their exceptionally physical and chemical properties. Recently, the trend of using temperature-sensitive materials like polymers and also tool steels of the highest hardnesses demands new low-temperature coating techniques for protective surface finishing as well as for functionalization of the surfaces. Titanium-based compounds can fulfill a wide range of these demands, but up to now there is a lack of industrially designed vacuum coating techniques operating at the temperatures lower than 50 °C necessary for these applications. The Pulsed Laser Deposition (PLD) process is known as one of the most promising candidates for the such problems. But up to now PLD is a well-established laboratory coating technology and has not become a standard industrial coating technique despite its outstanding process features. The missing of PLD coating systems, which fulfil the requirements for industrial applications like high-rate deposition and adequate sizes of deposition chambers is considered as one of the main obstacles for a breakthrough of the PLD technique. To overcome this problem an industrially designed PLD coating system has been developed and built at the Laser Center Leoben of JOANNEUM RESEARCH Forschungsgesellschaft mbH. The current paper summarizes results of structural, mechanical, tribological, optical and electrical investigations of the presently most important Ti-based coatings metallic titanium, titanium nitride (TiN), titanium oxide (TiO2) and titanium carbonitride (TiCN).

Słowa kluczowe

PL

powłoka; PLD; ablacja laserowa; Ti; TiN; TiO2; TiCN

EN

pulsed laser deposition; PLD; TiN; TiO2; TiCN

• Czasopismo: Inżynieria Materiałowa
• Rocznik: 2004
• Tom: R. XXV, nr 3
• Strony: 611-615
• Opis fizyczny: Bibliogr. 26 poz., rys.

Twórcy

autor

Lackner, J.M.

• Laser Center Leoben, JOANNEUM Research Forschungsgesellschaft mbH, Leobner Niklasdorf, Austria

autor

Waldhauser, W.

• Laser Center Leoben, JOANNEUM Research Forschungsgesellschaft mbH, Leobner Niklasdorf, Austria

autor

Berghauser, R.

• Laser Center Leoben, JOANNEUM Research Forschungsgesellschaft mbH, Leobner Niklasdorf, Austria

autor

Ebner, R.

• Laser Center Leoben, JOANNEUM Research Forschungsgesellschaft mbH, Leobner Niklasdorf, Austria

autor

Major, B.

• Institute of Metallurgy and Materials Science, Polish Academy of Sciences, Cracow

autor

Fian, A.

• Institute of Nanostructured Materials and Photonics, JOANNEUM Research Forschungsgesellschaft Weiz, Austria

autor

Jakopic, G.

• Institute of Nanostructured Materials and Photonics, JOANNEUM Research Forschungsgesellschaft Weiz, Austria

• Institute of Metallurgy and Materials Science, Polish Academy of Sciences, Cracow

Bibliografia

• [1] Valvoda V., Structure of TiN coatings, Surf. Coat. Techn. 80 (1996) 61-65.
• [2] Holmberg K., Matthews A., Coatings-Tribology, Elsevier, Amsterdam, 1994.
• [3] Helsen J.A., Bremę H.J., Metals as Biomaterials, Wiley, Chichester, 1998.
• [4] Bendavid A., Martin P.J., Jamting A., Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition, Thin Solid Films 355-356 (1999) 6-11.
• [5] Wang X., Zhang F., Zheng Z. et al., Mater. Lett. 44 (2000) 105
• [6] Buli S.J., Bhat. D.G., Staia M.H., Properties and performance of commercial TiCN coatings. Part l: coating architecture and hardness modelling, Surf. Coat. Techn. 163-164 (2003) 499-506.
• [7] Buli S.J., Bhat. D.G., Staia M.H., Properties and performance of commercial TiCN coatings. Part 2: tribological performance, Surf. Coat. Techn. 163-164 (2003) 507-514.
• [8] Lackner J.M., Waldhauser W., Ebner R., Lenz W., Mroź W., Pulsed Laser Deposition: Hartstoffschichten fur innovative Anwendungen, Galvanotechmk 5 (2003) 1226-1232.
• [9] Chrisey D.B., Hubler G.K. (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
• [10] Ebner R., Waldhauser W., Lenz W., Pulsed laser deposition: A new techniąue for coating sheet materials and three-dimensional industrial components, Proc. Materials Week 2001, Munich.
• [11] Lackner J.M., Innovative Coating by Pulsed Laser Deposition, Ph.D. Thesis, University of Leoben, 2003.
• [12] Thornton J. A., Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings, J. Vac. Sci. Techn. 11 (1974) 666-670.
• [13] Lenz W., Laserunterstiitzte Beschichtungstechnologie, Ph.D. thesis, University of Leoben, 1997.
• [14] Metev S. M., Yeiko V. P. (Eds.); in: Metev S. M., Veiko V. P., Laserassisted microtechnology; 2nd Edition; Springer; Berlin, 1998, 228.
• [15] Lackner J.M., Waldhauser W.,Ebner R., Lenz W., Major B., Schoberl T., Structural and tribological characterization of pulsed laserdeposited TiN thin films, Praktische Metallographie Sonderband 34 (2003)291-298.
• [16] Lackner J.M., Waldhauser W., Ebner R., Keckes J., Schoberl T., Room temperature deposition of (Ti,Al)N and (Ti,Al)(C,N) coatings by pulsed laser deposition for tribological applications, Surf. Coat. Techn. (2003), in print.
• [17] Major B., Mroź W., Wierzchon T., Waldhauser W., Lackner J.M., Ebner R., Pulsed laser deposition of advanced titanium nitride thin layers, Surf. Coat. Techn. (2003), in print.
• [18] Lackner J.M., Waldhauser W., Ebner R., Major B., Room temperature deposition of titanium carbonitride coatings by pulsed laser deposition for tribological applications, Surf. Coat. Techn. (2004), submitted.
• [19] Lackner J.M., Waldhauser W., Ebner R., Major B., Schoberl T., Room temperaturę pulsed laser deposition of titanium oxide coatings for industnal tribological applications, Surf. Coat. Techn. (2003), in print.
• [20] Jehn H.; in: Fischmeister H., Jehn H., Hartstoffschichten zur VerschleiBminderung, Deutsche Gesellschaft fur Metallkunde e. V., Oberursel, 1987.
• [21] Lackner J.M., Waldhauser W., Ebner R., Major B., Schoberl T., Structural, mechanical and tribological investigations of pulsed laser deposited TiN coatings, Thin Solid Films (2003), in print.
• [22] Luth H., Surfaces and Interfaces of Solid Materials, Springer-Verlag, Berlin, 1995.
• [23] Ko D.-H., Kim E.-H., Siqoung C., Microstructure analyses of the titanium films formed by the ionized sputtermg process, Thin Solid Films 340 (1999) 13-17.
• [24] Lackner J.M., Waldhauser W., Ebner R., Bakker R.J., Schoberl T., Major B.; Room temperaturę pulsed laser deposited (Ti,Al)CxNi_x coatings - chemical, Structural, mechanical and tribological properties; Thin Solid Films (2004), submitted.
• [25] Knotek O., Elsing R., Kramer G., Jungblut F., On the origin of compressive stress in PVD coatings - an explicative model, Surf. Coat Techn. 46 (1991) 265-274.
• [26] Banakh O., Schmid P.E., Sanjines R., Levy F., Electrical and optical properties of TiO„ thin films deposited by reactive magnetron sputtering, Surf. Coat. Techn. 151-152 (2002) 272-275.