Surface acoustic wave hydrogen gas sensor based on layered structure of palladium/metal-free phthalocyanine

• Autorzy: Jakubik, W.P. , Urbańczyk, M. , Maciak, E. , Pustelny, T.
• Języki publikacji: EN

Abstrakty

EN

A layered sensor structure of metal-free phthalocyanine H2PC (160 nm) with a very thin film of palladium (Pd-20 nm) on the top, has been studied for hydrogen gas-sensing application at relatively low temperatures of about 30°C and about 40°C. The layered structure was obtained by vacuum deposition (first the phthalocyanine Pc and than the Pd film) onto a LiNbO3Y- cut Z-propagating substrate, making use of the Surface Acoustic Wave method, and additionally (in this same technological processes) into a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. In such a layered structure we can detect hydrogen in a medium concentration range (from 0.5 to 3% in air) even at about 30°c. At elevated tem-perature up to about 40°C the differential frequency increases proportionally (almost linearly) to the hydrogen concentration and the response reaches its steady state very quickly. The response times are about 18 s at the lowest 0.5% hydrogen concentration to about 42 s at 4% (defined as reaching 100% of the steady state). In the case of the investigated layered structure a very good correlation has been observed between the two utilized methods - the frequency changes in the SAW method correlate quite well with the decreases of the layered structure resistance.

Słowa kluczowe

EN

layered structure, metal-free phthalocyanine; palladium; hydrogen gas sensor; surface acoustic wave

• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2008
• Tom: Vol. 56, nr 2
• Strony: 133-138
• Opis fizyczny: Bibliogr. 16 poz., rys.

Twórcy

autor

Jakubik, W.P.

autor

Urbańczyk, M.

autor

Maciak, E.

autor

Pustelny, T.

• Institute of Physics, Silesian University of Technology 2 Krzywoustego St., 44-100 Gliwice, Poland,

Bibliografia

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