Czasopismo
2006
|
Vol. 54, nr 2
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221-231
Tytuł artykułu
Autorzy
Wybrane pełne teksty z tego czasopisma
Warianty tytułu
Języki publikacji
Abstrakty
The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out in the Laboratory of Thick Film Microsystems at Wroc1aw University of Technology are presented. LTCC microfluidic system is described in detail. Moreover, a short information is given on other LTCC applications.
Słowa kluczowe
Rocznik
Tom
Strony
221-231
Opis fizyczny
Bibliogr. 74 poz., 18 rys., 1 tab.
Twórcy
autor
- Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 27 Wybrzeże Wyspianskiego St., 50-370 Wrocław, Poland, leszek.golonka@pwr.wroc.pl
Bibliografia
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- [40] J. Zhong, M. Yi, and H.H. Bau, “Magneto hydrodynamic (MHD) pump fabricated with ceramic tapes”, Sensors & Actuators A 96, 59–66 (2002).
- [41] P.Wasilek, L.J. Golonka, A. Gorecka-Drzazga, H. Roguszczak, and T. Zawada, “LTCC liquid conductivity detector”, Proc. 26th Int. Spring Seminar on Electronics Technology, High Tatras (Slovakia), 202–206 (2003).
- [42] L.J. Golonka, H. Roguszczak, T. Zawada, J. Radojewski, I. Grabowska, M. Chudy, A. Dybko, Z. Brzozka, and D. Stadnik, “LTCC based microfluidic system with optical detection”, Sensors and Actuators B 111–112, 396–402 (2005).
- [43] L.J.Golonka, T. Zawada, J. Radojewski, H. Roguszczak, and M. Stefanow, “LTCC microfluidic system”, Proc. 2005 IMAPS/AcerS 1st Int. Conf. and Exhib. on Ceramic Interconnect and Cer. Microsystem Technologies (CICMT), Baltimore (USA), 265–271 (2005).
- [44] K. Malecha, T. Zawada, and L.J. Golonka, “LTCC based microfluidic optical detector”, Proc. 28th Int. Spring Sem. on Electronics Technology, Wiener Neustadt (Austria), 347–351 (2005).
- [45] T. Zawada, K. Malecha, L.J. Golonka, J. Radojewski, H. Roguszczak, and M. Stefanow, “Integration of light detection in LTCC fluidic microsystem”, Proc. 15th European Microel. and Pack. Conf., Brugge (Belgium), 582–587 (2005).
- [46] L.J. Golonka, K. Malecha, H. Roguszczak, T. Zawada, M. Chudy, A. Dybko, and D. Stadnik, “LTCC fluidic module for optical detection”, Proc. 29th Int. Conf. of IMAPS, Koszalin-Darłówko, 357–360 (2005).
- [47] G. Ostromecki, T. Zawada, and L.J. Golonka, “Fluidic micromixer made in LTCC technology – preliminary results”, Proc. 28th Int. Spring Sem. on Electronics Technology, Wiener Neustadt (Austria), 352–357 (2005).
- [48] K. Budniewski, L.J. Golonka, H. Roguszczak, T. Zawada, and T. Dobosz, “Microchamber PCR device in LTCC – modelling and preliminary experiments”, Proc. VI Optoel. and Electronic Sensors Conf. COE’2004, Wroclaw, 90–93 (2004).
- [49] K. Budniewski, L.J. Golonka, T. Zawada, H. Roguszczak, T. Dobosz, and A. Jonkisz, “Design and FEM analysis of a novel microchamber PCR device fabricated in LTCC technology”, Proc. 28th Conf. of IMAPS Poland, Wroclaw, 191–194 (2004).
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Bibliografia
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