BN-based nano-composites obtained by pulsed laser deposition

• Autorzy: Major, B. , Mróz, W. , Jelinek, M. , Kosydar, R. , Kot, M. , Major, Ł. , Burdyńska, S. , Kustosz, R.
• Języki publikacji: EN

Abstrakty

EN

Boron nitride thin layers were produced by means of the pulsed laser deposition technique from hexagonal boron nitride target. Two types of laser Le. Nd:YAG with Q-switch as well as KrF coupled with RP generator were used. Influence of deposition parameters on surface morphology, phase composition as well as mechanical properties is discussed. Results obtained using Fourier Transformed Infrared Spectroscopy, Transmission and Scanning Electron Microscopy, Atomic Force Microscopy are presented. Micromechanical properties measured during microindentation, scratch and wear tests are also shown.

Słowa kluczowe

EN

boron nitride; pulsed laser deposition; coatings; nanocomposites

• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2006
• Tom: Vol. 54, nr 2
• Strony: 181-188
• Opis fizyczny: Bibliogr. 14 poz., 14 rys., 6 tab.

Twórcy

autor

Major, B.

autor

Mróz, W.

autor

Jelinek, M.

autor

Kosydar, R.

autor

Kot, M.

autor

Major, Ł.

autor

Burdyńska, S.

autor

Kustosz, R.

• Institute of Metallurgy and Materials Science, Polish Academy of Sciences, 30-059 Cracow, 25 Reymonta St., Poland,

Bibliografia

• [1] P.B. Mirkarimi, K.F. McCarty, and D.L. Medlin, “Review of advances in cubic boron nitride film synthesis”, Materials Science and Engineering R21, 47–100 (1997).
• [2] R. Haubner, M. Wilhelm, R. Weissenbacher, and B. Lux, “Boron nitrides properties synthesis and applications”, Structure and Bonding 102, 1 (2002).
• [3] Y. Yap, T. Aoyama, Y. Wada, M. Yoshimura, Y. Mori, and T. Sasaki, “Growth of adhesive c-BN films on a tensile BN buffer layer”, Diamonds and Related Materials 9, 592–595 (2000).
• [4] C. Ronning, H. Feldermann, and H. Hofsass, “Growth, doping and applications of cubic boron nitride thin films”, Diamonds and Related Materials 9, 1767– 1773 (2000).
• [5] A. Klett, R. Freudenstein, M.F. Plass, W. Kulisch, “Stress of c-BN thin films: a parameter investigation”, Surface and Coatings Technology 116–119, 86–92 (1999).
• [6] S. Acquaviva, G. Leggieri, A. Luches, A. Perrone, A. Zocco, N. Laidani, G. Speranza, and M. Anderle, “Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN”, Applied Physics A70, 197–201 (2000).
• [7] C. Hu, S. Kotake, Y. Suzuki, and M. Senoo, “Boron nitride thin films synthesized by reactive sputtering”, Vacuum 59, 748–754 (2000).
• [8] S. Weissmantel and G. Reisse, “Properties of ion-assisted PLD h-BN/c-BN layer systems”, Applied Surface Science 154–155, 428– 433 (2000).
• [9] G. Reisse and S. Weissmantel “Characterization of pulsed laser deposited h-BN films and h-BN/c-BN layer systems”, Thin Solid Films 355–356, 105–111 (1999).
• [10] D. Kester, K. Ailey, D. Lichtenwalner and R. Davis, “Growth and characterization of cubic boron nitride thin films”, Journal of Vacuum Technology A12 (6), 3074 (1994).
• [11] T. Sekine, Sato, “Shock-induced mechanisms of phase transformations from rhombohedral BN to cubic BN”, Journal of Applied Physics 74(4), 2440– 2444 (1993).
• [12] J. E. Greene, “Physics of film growth from the vapor phase”, in Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices, eds. O. Auciello, J. Engemann, Kluwer Academic Publishers, NATO ASI Series E: Applied Sciences 234, 39 (1993).
• [13] G.H. Gilmer, H. Huang, and C. Roland, “Thin film deposition: fundamentals and modelling”, Comp. Mat. Sc. 12, 354–380 (1998).
• [14] W. Mróz, “Physics of growth of thin films deposited by laser ablation”, E-MRS 2003 Fall Meeting, Solid State Phenomena 101–102, 187–196 (2005).