Applications of deep x-ray lithography

• Autorzy: Hirata, Y.
• Języki publikacji: EN

Abstrakty

EN

We developed the LIGA process using a compact synchrotron radiation (SR) source and ceramics micro fabrication process. These processes realized an array of lead zir-conate titanate (PZ7) rods whose cross section is 25 urn and was applied to manufacture piezocomposite for high resolution ultrasonic diagnosis for the first time. We also developed microconnector by the LIGA process.

Słowa kluczowe

EN

lithography; radiation; micromachine

• Czasopismo: Materiały Elektroniczne
• Rocznik: 2001
• Tom: T. 29, nr 1-2
• Strony: 61-68
• Opis fizyczny: Bibliogr. 7 poz., rys.

Twórcy

autor

Hirata, Y.

• Sumitomo Electric Idustries, Ltd., Harima Research Laboratories,