Micromachined silicon sensors

• Autorzy: Iwaoka, H.
• Języki publikacji: EN

Abstrakty

EN

This paper reviews novel silicon micromachining technology and sensors developed in Yokogawa Electric Corporation. Two types of pressure sensors are described: a highly stable and accurate resonant sensor fabricated using special vacuum encapsulation technology: and an integrated pressure sensor with twin diaphragms and micro over-range protection structures. Also described are silicon bolometers and micro variable infrared filters for infrared spectroscopy of gas analyses and silicon mi-croforce sensors.

Słowa kluczowe

EN

micromachine; silicon sensor

• Czasopismo: Materiały Elektroniczne
• Rocznik: 2001
• Tom: T. 29, nr 1-2
• Strony: 49-60
• Opis fizyczny: Bibliogr. 8 poz., rys., wykr.

Twórcy

autor

Iwaoka, H.

• Yokogawa Electric Corporation. Micromachining Laboratory Corporate R&D Center,