Application of DLC layers in 3-omega thermal conductivity method

• Autorzy: Wojciechowski, K. T. , Zybala, R. , Mania, R.
• Języki publikacji: EN

Abstrakty

EN

Purpose: The 3-omega method is a unique measuring technique which can be applied for thermal conductivity measurements of bulk materials and layers. In order to measure thermal conductivity of semiconducting and metallic materials (e.g. thermoelectric materials) it is necessary to separate the sensor from the substrate by a dielectric layer. The layer should exhibit thermal conductivity .s comparable or greater than thermal conductivity of characterised materials, as well as good, electrically insulating properties. Design/methodology/approach: The DLC layers were prepared via the magnetron sputtering technique. The reactive sputtering process was carried out in the mixture of Ar and methane (CH4) work gases at the pressure ranging from 0.3 to 0.7 Pa. The layers were deposited on glass and selected thermoelectric materials. The temperature of substrate was controlled in range from 35 oC to 500 oC depending on type of the substrate material. The thickness of received DLC layers was in range from 0.2 to 2 žm. Findings: In order to estimate the accuracy of the modified 3-omega method thermal conductivity measurement results were compared to results of measurements without additional DLC layers and independent data obtained by the laser-flash method. Analysis of experimental results of test measurements show that application of 300 nm thick DLC insulating films allow for characterization of materials exhibiting . < 1.2Wm-1K-1 with the accuracy better than 9%. Research limitations/implications: Results of investigations indicate that prepared DLC layers satisfy requirements of 3-omega method and do not influence significantly on precision and accuracy of thermal conductivity measurements. Originality/value: We have developed the new method of preparation of diamond-like carbon (DLC) layers which satisfy requirements of the 3-omega technique. The layers can be applied for thermal properties measurements of selected thermoelectric materials.

Słowa kluczowe

PL

cienka warstwa; metoda 3-omega; przewodnictwo cieplne; DLC

EN

thin layer; 3-omega method; thermal conductivity; DLC

• Czasopismo: Journal of Achievements in Materials and Manufacturing Engineering
• Rocznik: 2009
• Tom: Vol. 37, nr 2
• Strony: 512-517
• Opis fizyczny: Bibliogr. 15 poz., rys., tabl.

Twórcy

autor

Wojciechowski, K. T.

autor

Zybala, R.

autor

Mania, R.

• Department of Inorganic Chemistry, Faculty of Materials Science and Ceramics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland,

Bibliografia

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