Investigations of electrical and optical properties of functional TCO thin films

• Autorzy: Domaradzki, J. , Kaczmarek, D. , Drabczyk, K. , Panek, P.
• Języki publikacji: EN

Abstrakty

EN

Transparent conducting oxide (TCO) films of indium-tin-oxide were evaporated on the surface of silicon wafers after phosphorous diffusion and on the reference glass substrates. The influence of deposition process parameters (electron beam current, oxygen flow and the substrate temperature) on optical and electrical properties of evaporated thin films were investigated by means of resistivity measurements and optical spectrophotometry. The performance of prepared thin films was judged by calculated figure of merit and the best result was obtained for the sample deposited on the substrate heated to the 100 degrees C and then removed from the deposition chamber and annealed in an air for 5 minutes at 400 degrees C. Refractive index and extinction coefficient were evaluated based on measured transmission spectra and used for designing of antireflection coating for solar cell. The obtained results showed that prepared TCO thin films are promising as a part of counter electrode in crystalline silicon solar cell construction.

Słowa kluczowe

EN

transparent conducting oxide; crystalline silicon solar cell; transparent counter electrode

• Czasopismo: Materials Science Poland
• Rocznik: 2015
• Tom: Vol. 33, No. 2
• Strony: 363--368
• Opis fizyczny: Bibliogr. 9 poz., rys., tab.

Twórcy

autor

Domaradzki, J.

• Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Z. Janiszewskiego 11/17, 50-372 Wroclaw, Poland,

autor

Kaczmarek, D.

• Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Z. Janiszewskiego 11/17, 50-372 Wroclaw, Poland

autor

Drabczyk, K.

• Polish Academy of Sciences, Institute of Metallurgy and Materials Science, Reymonta 25, 30-059 Cracow, Poland

autor

Panek, P.

• Polish Academy of Sciences, Institute of Metallurgy and Materials Science, Reymonta 25, 30-059 Cracow, Poland

Bibliografia

• [1] GINLEY D.S., BRIGHT C., MRS Bull., 25 (2000), 15.
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• [3] BEYER W., H¨UPKES J., STIEBIG H., Thin Solid Films, 516 (2007), 147.
• [4] JUNG Y.S., LEE D.W., JEON D.Y., Appl. Surf. Sci., 221, (2004) 136.
• [5] JAN S.W., LEE S.C., J. Electrochem. Soc., 134 (8) (1987), 2056.
• [6] HOLMELUND E., THESTRUP B., SCHOU J., LARSEN N.B., NIELSEN M.M., JOHNSON E., TOUGAARD S., Appl. Phys. A, 74 (2002), 147.
• [7] WILLEY R.R., Practical Production of Optical Thin Films, Vol. 2, Willey Optical, Consultants, Charleviox, 2008.
• [8] THEISS W., SCOUT Software, www.mtheiss.com.
• [9] HAACKE G., J. Appl. Phys., 47 (1976), 4086.

Identyfikatory

DOI

10.1515/msp-2015-0057