Multiaxis interferometric displacement measurement for local probe microscopy

• Autorzy: Josef Lazar , Jan Hrabina , Mojmír Šerý , Petr Klapetek , Ondřej Číp
• Języki publikacji: EN

Abstrakty

EN

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Słowa kluczowe

EN

interferometry; nanometrology; microscopy

• Czasopismo: Open Physics
• Rocznik: 2012
• Tom: 10
• Numer: 1
• Strony: 225-231

Daty

wydano

2012-02-01

online

2011-12-03

Twórcy

autor

Josef Lazar

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic,

autor

Jan Hrabina

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

autor

Mojmír Šerý

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

autor

Petr Klapetek

• Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic

autor

Ondřej Číp

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

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Identyfikatory

DOI

10.2478/s11534-011-0093-5