T- and H- forms of dc oxygen discharge at medium pressures: spectroscopic study

• Autorzy: Lukáš Schmiedt , Matěj Jan Morávek , Adolf Kaňka , Věra Hrachová
• Języki publikacji: EN

Abstrakty

EN

The active DC glow discharge sustained in the pure oxygen can be employed in various technological applications, such as thin layer deposition or sterilization. Considering applied pressures of hundreds of Pascals, two different forms of the positive column of the discharge can co-exist: T- and H-form. These forms are commonly distinguished according to the values of the axial electric field strength: values in the H-form are generally one order of magnitude higher compared to the T-form. However, electric measurement itself may often affect the discharge plasma. Optical emission spectroscopy as a non-invasive diagnostic was therefore employed as an alternate characterization of both forms. We found that the H- and T-forms can be clearly recognized by values of intensities of particular oxygen spectral lines. This characterization enabled us to observe transition between the both particular forms when spatial distribution measurements were employed. Moreover, transition in the rotational temperature Trot was also observed.

EN

Słowa kluczowe

EN

oxygen glow discharge; T- and H- forms of positive column; optical emission spectroscopy

• Czasopismo: Open Chemistry
• Rocznik: 2015
• Tom: 13
• Numer: 1

Daty

otrzymano

2014-01-29

zaakceptowano

2014-04-30

online

2014-11-26

Twórcy

autor

Lukáš Schmiedt

• Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic

autor

Matěj Jan Morávek

• Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic

autor

Adolf Kaňka

• Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic

autor

Věra Hrachová

• Charles University in Prague, Faculty of Mathematics and Physics, Department of Surface and Plasma Science, V Holešovičkách 2, 180 00 Praha 8, Czech Republic

Bibliografia

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Identyfikatory

DOI

10.1515/chem-2015-0050