The 5-axis systems, especially those that use in their kinematic chain both prismatic joints and revolute kinematic pairs are gaining popularity in many scientific disciplines with manufacturing, metrology and robotics at the forefront. This is therefore important to undertake research aiming in identification of sources of inaccuracies in their functioning and investigation on possibility of eliminating or compensating them. A significant impact on 5-axis kinematic structures accuracy may be assigned to parameters associated with the stabilization of the machine position and angular position, such as position stabilization time, position overshoot and drift of positioning accuracy. These parameters are well described in ISO 9283 standard related to performance criteria and test methods for industrial robots. The methodology presented in this standard is adapted for testing the impact of mentioned parameters for functioning of 5-axis kinematic structures other than industrial robots, which mainly include five-axis coordinate measuring systems and machine tools. A series of experiments performed on five-axis coordinate measuring system is presented in this paper, their results are assessed in a quantitative manner and basing on them a general algorithm for assessing the significance of impact of position stabilization parameters on functioning of the manipulator is proposed.