This paper reports results of an ongoing research on MOSFET parameter extraction using the EKV model. This work continues efforts in finding the best method for efficient and robust parameter extraction based on voltage-current structure characteristics. In the extraction process, voltage-current characteristics are matched by the characteristics generated by the model. Values of parameters for which the best match is observed are the result of the extraction. The extraction process is considered an optimization problem, which is then solved by an evolutionary algorithm followed by the Nelder-Mead simplex. The influence of the measurement error on the extraction results is investigated experimentally.