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Application of DLC layers in 3-omega thermal conductivity method

Wojciechowski K. T., Zybala R., Mania R.

Journal of Achievements in Materials and Manufacturing Engineering

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2009

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Vol. 37, nr 2

512-517

EN

Purpose: The 3-omega method is a unique measuring technique which can be applied for thermal conductivity measurements of bulk materials and layers. In order to measure thermal conductivity of semiconducting and metallic materials (e.g. thermoelectric materials) it is necessary to separate the sensor from the substrate by a dielectric layer. The layer should exhibit thermal conductivity .s comparable or greater than thermal conductivity of characterised materials, as well as good, electrically insulating properties. Design/methodology/approach: The DLC layers were prepared via the magnetron sputtering technique. The reactive sputtering process was carried out in the mixture of Ar and methane (CH4) work gases at the pressure ranging from 0.3 to 0.7 Pa. The layers were deposited on glass and selected thermoelectric materials. The temperature of substrate was controlled in range from 35 oC to 500 oC depending on type of the substrate material. The thickness of received DLC layers was in range from 0.2 to 2 žm. Findings: In order to estimate the accuracy of the modified 3-omega method thermal conductivity measurement results were compared to results of measurements without additional DLC layers and independent data obtained by the laser-flash method. Analysis of experimental results of test measurements show that application of 300 nm thick DLC insulating films allow for characterization of materials exhibiting . < 1.2Wm-1K-1 with the accuracy better than 9%. Research limitations/implications: Results of investigations indicate that prepared DLC layers satisfy requirements of 3-omega method and do not influence significantly on precision and accuracy of thermal conductivity measurements. Originality/value: We have developed the new method of preparation of diamond-like carbon (DLC) layers which satisfy requirements of the 3-omega technique. The layers can be applied for thermal properties measurements of selected thermoelectric materials.

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Charakterystyka właściwości cieplnych warstw ochronnych metodą 3-omega

Zybała R., Wojciechowski K. T., Kucza W., Gajerski R., Godlewska E., Mania R.

Elektronika : konstrukcje, technologie, zastosowania

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2009

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Vol. 50, nr 9

22-24

PL

Przedmiotem pracy są badania przewodnictwa cieplnego powłok ochronnych, dla stali wysokogatunkowej oraz materiałów termoelektrycznych, które pełnią jednocześnie funkcje barier termicznych TBC (Thermal Barrier Coatings). Badania przewodnictwa cieplnego powłok wykonano metodą 3-omega. Stwierdzono, że otrzymane powłoki charakteryzują się bardzo dobrymi właściwościami izolacyjnymi. Najniższe przewodnictwo cieplne (0,8 Wm ⁻ K ⁻) zmierzono dla powłok wykonanych na bazie przemysłowych farb wykonanych z żywic fenylometylo siloksanowych odpornych termicznie do 700*C.

EN

The paper deals with thermal conductivity of protective layers for highperformance steel and thermoelectric materials, which also have function of thermal barrier coatings TBC. Measurements of thermal conductivity were made by a 3-omega method. It has been found, that the investigated coatings exhibit very good insulating properties. The lowest thermal conductivity (0,8 Wm ⁻¹ K ⁻¹) was measured for the coatings based on commercial available paint, polysiloxane resin, thermally stable up to 700*C.

3

Zastosowanie metody 3-ω do pomiaru przewodnictwa cieplnego materiałów litych oraz warstw

Wojciechowski K. T., Mania R., Mars K., Zybała R.

Elektronika : konstrukcje, technologie, zastosowania

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2007

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Vol. 48, nr 10

61-63

PL

Technologie mikroelektroniczne wymagają opracowania metod pomiaru przewodnictwa cieplnego materiałów otrzymywanych w postaci cienkich warstw nanoszonych na metaliczne lub ceramiczna podłoża. Metoda 3-omega pozwala na wykonanie dokładnych pomiarów przewodnictwa cieplnego materiałów litych oraz warstw w kierunku prostopadłym do podłoża. Opisano opracowaną metodę oraz układ pomiarowy. Metoda została sprawdzona na różnego typu materiałach monokrystalicznych, polikrystalicznych oraz warstwach w zakresie przewodnictwa cieplnego 0,2...140 Wm-1K-1.

EN

Technology in microelectronics requires the development of methods of measuring thermal conductivities of materials in the form of films deposited on the substrate. The 3-omega provides accurate measurements of values of thermal conductivity of bulk materials and films in normal-to-plane direction. The paper describes developed method and experimental setup. The method was successfully verified on various polycrystalline materials, single crystals and layers over the thermal conductivity range from 0.2 to 140 Wm-1 K-1.