Growing and clustering the sp2 bonded carbon fraction in the tetrahedral carbon (ta-C) films by ion implantation is confirmed by Raman spectral analysis. The examination of the film transforming evolved on an atomic scale indicates the formation of structures with the higher degree of order. The graphitic basal planes are formed preferably in the perpendicular direction to the film surface. The implantation gives the change in measured values of the contact angle, which can vary from original near 70 degrees for as deposited films to about 60 degrees for implanted films. The implanted tetrahedral carbon films display very similar surface properties at the quite different bulk structure.
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