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1 2006

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InAs/GaSb superlattice focal plane arrays for high-resolution thermal imaging

Rehm R., Walther M., Schmitz J., Fleißner J., Fuchs F., Ziegler J., Cabanski W.

Opto-Electronics Review

2006

Vol. 14, No. 1

19-24

The first fully operational mid-IR (3–5 um) 256x256 IR-FPA camera system based on a type-II InAs/GaSb short-period superlattice showing an excellent noise equivalent temperature difference below 10 mK and a very uniform performance has been realized. We report on the development and fabrication of the detector chip, i.e., epitaxy, processing technology and electro-optical characterization of fully integrated InAs/GaSb superlattice focal plane arrays. While the superlattice design employed for the first demonstrator camera yielded a quantum efficiency around 30%, a superlattice structure grown with a thicker active layer and an optimized V/III BEP ratio during growth of the InAs layers exhibits a significant increase in quantum efficiency. Quantitative responsivity measurements reveal a quantum efficiency of about 60% for InAs/GaSb superlattice focal plane arrays after implementing this design improvement.