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Effect of electron beam injection on boron redistribution in silicon and oxide layer

Qin S., Tan Y., Li J., Jiang D., Wen S., Shi S.

Materials Science Poland

2017

Vol. 35, No. 1

14--17

The behavior of boron redistribution in silicon with and without oxide layer after electron beam injection (EBI) was investigated. Special defect shapes were generated on the surface of bare and oxidized silicon wafers. Secondary ion mass spectrometer was used to measure the boron profile. The results showed that after long EBI time, boron tended to be induced from both sides of the transition region between the oxide layer and silicon. For the sample without oxide layer after EBI, boron tended to diffuse towards the surface and its concentration obviously reduced inside the silicon. The results of the study show the potential use of the process in removing boron impurity in silicon.

Geological defect and its geophysical prediction method in Karst Tunel

Li L., Li S., Zhou Z., Xu Z., Shi S., Zhang Q., Zhou Y., Hu C.

Przegląd Elektrotechniczny

2013

R. 89, nr 1b

116--119

With the rapid development of traffic tunnels construction in mountain area in the world, hydrogeological conditions are becoming unprecedentedly complex, water inrush and mud gushing is one of the typical common geologic hazards for the karst tunnel construction. .Based on the analyzing karst tunnel water inrush examples in recent years in china, the mechanism of geologic structure for water inrush has been explained through analyzing different karst hydrogeological storage structures. The unfavorable geologic bodies can be forecasted by geophysical method, and the detecting device and the signal receiving sensor would be selected for different water-bearing structure. The seismic wave, electromagnetic wave will be reflected and received by sensor when encountered geological defect, and the attributes of unfavorable geologic bodies were identified based on the returned signal. Risk assessment of water inrush must be done firstly during tunnel construction, an optimal system for water-bearing structure detecting in which prediction methods vary with the risk level of water inrush can be probed. As a result, the hazard prevention & controlling technological system of water inrush of karst tunnel is composed of risk evaluation system and comprehensive geological prediction system. It has been successfully used for hazards prevention and control for water inrush of Qiyueshan Tunnel in Hurong highway, including risk assessment and hazard source detection. Conclusions will benefit further research on hazards control of underground construction.

Wraz z szybkim rozwojem budowy tuneli w terenach górskich rośnie znaczenie oceny warunków hydrogeologicznych: W szczególności, w przypadku tuneli w terenach krasowych, typowym niebezpieczeństwem jest napór wody i tryskające błoto. Na podstawie analizy wypadków w tunelach krasowych w Chinach w ostatnich latach, wyjaśniono mechanizm naporu wody przez analizę różnych formacji hydrogeologicznych w obszarach krasowych. Niekorzystne warunki geologiczne można prognozować metodami geofizycznymi, przez zastosowanie urządzenia detekcji sygnałów odbitych od różnych struktur wodonośnych. Podczas projektowania tunelu należy ocenić ryzyko wystąpienia naporu wody i przeprowadzić wszechstronną prognozę geologiczną. Przy budowie tunelu Qiyushan linii kolejowej Hurong przeprowadzono badania obejmujące oszacowanie ryzyka i wskazano źródła niebezpieczeństw.