Titanium and its alloys have very attractive properties for many industries. But using of titanium and its alloys are very low in mechanical engineering applications because of poor tribological properties. In this study, surface modification of Ti6Al4V titanium alloy has been made with various temperatures by plasma nitriding process. Plasma nitriding treatment has been performed in 80% N2-20% H2 gas mixture, for treatment times of 2-15 h at the temperatures of 700-1000 degree C. Surface properties of plasma nitrided Ti6Al4V alloy was examined by metalographic inspection, X-Ray difraction and vichers hardness. Two layers were determined by optic inspection on the samples that called compound and diffusion layers. Compound layer contain TiN and Ti2N nitrides, XRD results support in this formations. Maximum hardness has been obtained at 10h treatment time and 1000 degree C treatment temperature. Micro hardness tests showed that hardness properties of the nitrided samples depend on treatmant time and temperature.
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