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Characteristics of pure Love mode SAW sensor with graphene interdigital transducer for biosensing applications

Chen Chen, Wang Xinyu, Wang Yuting

Journal of Theoretical and Applied Mechanics

2022

Vol. 60 nr 4

551--559

The characteristics of Love wave biosensors are systematically investigated. The results show that sensors with combination of a ZnO guiding layer and 90ST or 90AT Quartz substrates exhibit purer Love modes than those with the SiO2 guiding layer. The corresponding maxi- mum sensitivities are −10.9069 and −11.641m2/kg, respectively, which are nearly two times higher than those of SiO2 layer. The ZnO/90ST Quartz Love wave sensor exhibits the largest K2 of 0.3022 and achieves 0 ppm/oC of TCF at hZnO/λ = 0.0216. The sensor employing the Graphene IDT further improves the sensitivity by nearly one order of magnitude.