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Analysis of the Surface Microtexture of Sputtered Indium Tin Oxide Thin Films

Ţălu Ştefan, Kulesza Sławomir, Bramowicz Miroslaw, Stępień Krzysztof, Dastan D.

Archives of Metallurgy and Materials

2021

Vol. 66, iss. 2

443--450

The present research work involves the study of the 3-D surface microtexture of sputtered indium tin oxide (ITO) prepared on glass substrates by DC magnetron at room temperature. The samples were annealed at 450°C in air and were distributed into five groups, dependent on ambient combinations applied, as follows: I group, using argon (Ar); II group, using argon with oxygen (Ar+O2); III group, using argon with oxygen and nitrogen (Ar+O2+N2); IV group, using argon with oxygen and hydrogen (Ar+O2+H2); and V group, using argon with oxygen, nitrogen, and hydrogen (Ar+O2+N2+H2). The characterization of the ITO thin film surface microtexture was carried out by atomic force microscopy (AFM). The AFM images were stereometrically quantitatively analyzed to obtain statistical parameters, by ISO 25178-2: 2012 and ASME B46.1-2009. The results have shown that the 3-D surface microtexture parameters change in accordance with different fabrication ambient combinations.

Surface micromorphology characterization of PDI8-CN2 thin films on H-Si by AFM analysis

Ţălu Ştefan, Kulesza Slawomir, Bramowicz Miroslaw, Solaymani Shahram, Ţălu Mihai, Nezafat Negin Beryani, Rezaee Sahar

Materials Science Poland

2020

Vol. 38, No. 2

334--340

A nanoscale investigation of three-dimensional (3-D) surface micromorphology of archetypical N, N0- bis (n-etyl) x:y, dicyanoperylene- 3, 4:9, 10 bis (dicarboximide) (PDI8-CN2) thin films on H-Si substrates, which are applicable in n-type semiconducting compounds, has been performed by using fractal analysis. In addition, surface texture characteristics of the PDI8-CN2 thin films have been characterized by using atomic force microscopy (AFM) operated in tapping-mode in the air. These analyses revealed that all samples can be described well as fractal structures at nanometer scale and their three dimensional surface texture could be implemented in both graphical models and computer simulations.