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MBE-grown MCT hetero- and nanostructures for IR and THz detectors

Dvoretsky S. A., Mikhailov N. N., Remesnik V. G., Sidorov Y. G., Shvets V. A., Ikusov D. G., Varavin V. S., Yakushev M. V., Gumenjuk-Sichevska J. V., Golenkov A. G., Lysiuk I. O., Tsybrii Z. F., Shevchik-Shekera A. V., Sizov F. F., Latyshev A. V., Aseev A. L.

Opto-Electronics Review

2019

Vol. 27, No. 3

282--290

We present an overview of our technological achievements in the implementation of detector structures based on mercury cadmium telluride (MCT) heterostructures and nanostructures for IR and THz spectral ranges. We use a special MBE design set for the epitaxial layer growth on (013) GaAs substrates with ZnTe and CdTe buffer layers up to 3” in diameter with the precise ellipsometric monitoring in situ. The growth of MCT alloy heterostructures with the optimal composition distribution throughout the thickness allows the realization of different types of many-layered heterostructures and quantum wells to prepare the material for fabricating single- or dual-band IR and THz detectors. We also present the two-color broad-band bolometric detectors based on the epitaxial MCT layers that are sensitive in 150–300-GHz subterahertz and infrared ranges from 3 to 10μm, which operate at the ambient or liquid nitrogen temperatures as photoconductors, as well as the detectors based on planar HgTe quantum wells. The design and dimensions of THz detector antennas are optimized for reasonable detector sensitivity values. A special diffraction limited optical system for the detector testing was designed and manufactured. We represent here the THz images of objects hidden behind a plasterboard or foam plastic packaging, obtained at the radiation frequencies of 70, 140, and 275 GHz, respectively.

Linear HgCdTe IR FPA 288 × 4 with bidirectional scanning

Vasilyev V. V., Predein A. V., Varavin V. S., Mikhailov N. N., Dvoretsky S. A., Gumenjuk-Sichevska J. V., Golenkov A. G., Reva V. P., Sabinina I. V., Sidirov Y. V., Susliakov A. O., Sizov F. F., Aseev A. L.

Opto-Electronics Review

2010

Vol. 18, No. 3

332-337

The long wavelength (8-12 μm) IR FPA 288×4 based on a hybrid assembly of n+-p diode photosensitive arrays (PA) of HgCdTe (MCT) MBE-grown structures and time delay integration (TDI) readout integrated circuits (ROIC) with bidirectional scanning have been developed, fabricated, and investigated. The p-type MCT structures were obtained by thermal annealing of as-grown n-type material in inert atmosphere. The MCT photosensitive layer with the composition 0.20-0.23 of mole fraction of CdTe was surrounded by the wide gap layers to decrease the recombination rate and surface leakage current. The diode arrays were fabricated by planar implantation of boron ions into p-MCT. The typical dark currents were about 4-7 nA at the reverse bias voltage of 150 mV. The differential resistance R was up to R₀ = 1.6×10⁷ Ω zero bias voltage, which corresponded to R₀A ∼70 Ω •cm² and to the maximal value Rmax = 2.1 × 10⁸ Ω. The bidirectional TDI deselecting ROIC was developed and fabricated by 1.0-μm CMOS technology with two metallic and two polysilicon layers. The IR FPAs were free of defect channels and have the average values of responsivity Sλ = 2.27×10⁸ V/W, the detectivity Dλ * = 2.13 × 10¹¹ cm × Hz½ × W⁻¹, and the noise equivalent temperature difference NETD = 9 mK.

HgCdTe epilayers on GaAs : growth and devices

Varavin V. S., Vasiliev V. V., Dvoretsky S. A., Mikhailov N. N., Ovsyuk V. N., Sidorov Y. G., Suslyakov A. O., Yakushev M. V., Aseev A. L.

Opto-Electronics Review

2003

Vol. 11, No. 2

99-111

View of basic and specific physical and chemical features of growth and defect formation in mercury cadmium telluride (MTC) heterostructures (HS's) on GaAs substrates by molecular beam epitaxy (MBE) was made. On the basis of this knowledge a new generation of ultra high vacuum set, ultra-fast ellipsometer of high accuracy and automatic system for control of technological processes was produced for reproducibility of growth MCT HS's on substrates up to 4'' in diameter. The development of industrially oriented technology of MCT HS's growth by MBE on GaAs substrates 2'' in diameter and without intentional doping is presented. The electrical characteristics of n-type and p-type of MCT HS's and uniformity of MCT composition over the surface area are excellent. The residual donor and acceptor centres are supposed as hypothetically tellurium atoms in metalic sublattice ("antisite" tellurium) and double-ionised mercury vacancies. The technology of fabricating focal plane arrays is developed. The high quality characteristics of infrared detectors conductance and diode mode are measured. Calculations of detector parameters predicted the improvement in serial resistance and detectivity of infrared diode detectors based on MCT heterostructures with graded composition throughout the thickness.